JPS629727Y2 - - Google Patents
Info
- Publication number
- JPS629727Y2 JPS629727Y2 JP18756585U JP18756585U JPS629727Y2 JP S629727 Y2 JPS629727 Y2 JP S629727Y2 JP 18756585 U JP18756585 U JP 18756585U JP 18756585 U JP18756585 U JP 18756585U JP S629727 Y2 JPS629727 Y2 JP S629727Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- basket
- storage container
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 193
- 238000003860 storage Methods 0.000 claims description 40
- 238000000034 method Methods 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- 239000011295 pitch Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18756585U JPS629727Y2 (en]) | 1985-12-05 | 1985-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18756585U JPS629727Y2 (en]) | 1985-12-05 | 1985-12-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6197842U JPS6197842U (en]) | 1986-06-23 |
| JPS629727Y2 true JPS629727Y2 (en]) | 1987-03-06 |
Family
ID=30745026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18756585U Expired JPS629727Y2 (en]) | 1985-12-05 | 1985-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS629727Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI663671B (zh) * | 2015-04-30 | 2019-06-21 | 環球晶圓股份有限公司 | 晶圓轉換裝置及其晶圓轉換方法 |
-
1985
- 1985-12-05 JP JP18756585U patent/JPS629727Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6197842U (en]) | 1986-06-23 |
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